A multiple white light interferometer

被引:4
作者
Raz, E [1 ]
机构
[1] TECHNION ISRAEL INST TECHNOL,IL-32000 HAIFA,ISRAEL
关键词
D O I
10.1063/1.1147152
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
A multiple interferometer using the short coherence length of white light has been constructed and its operation demonstrated. With this apparatus, it is possible to count the number of light reflections between two parallel mirrors. The shift in fringe position resulting from differences in the optical thickness is proportional to the number of reflections between the two mirrors, enabling the resolution and measurement of a step difference of the order of 20 Angstrom. This technique inherently has higher resolution than Michelson interferometers. As compared with Fabry-Perot interferometers, it offers an independent determination of the density of fringes, and has lower sensitivity to errors in minor parallelism. Further, the method does not require the extreme closeness in mirror spacing as compared to the Tolansky interferometer. (C) 1996 American Institute of Physics.
引用
收藏
页码:3416 / 3419
页数:4
相关论文
共 4 条
[1]  
[Anonymous], 1985, Optical Interferometry
[2]  
[Anonymous], 1960, SURFACE MICROTOPOGRA
[3]  
KRUNG W, 1964, CONTRIBUTION INTERFE
[4]  
Tolansky S., 1970, Multiple Beam Interferometry of Surface and Films