Cross-sectional TEM investigations of plasmopolymer-metal composite films

被引：7

作者：

Grunewald, W

Heilmann, A

Reinhardt, C

机构：

[1] Institute of Physics, Tech. University Chemnitz-Zwickau

[2] Lehrst. Analyt. an F., Institut für Physik

来源：

APPLIED SURFACE SCIENCE | 1996年 / 93卷 / 02期

关键词：

D O I：

10.1016/0169-4332(95)00323-1

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Plasmapolymer-metal composite films were investigated by means of cross-sectional transmission electron microscopy (XTEM). Copper and silver were encapsulated as small particles in the plasmapolymer matrix. Size and shape of the silver particles depend on the polymerization power density. Within films deposited with low polymerization power density, the silver particles are almost spherical and a three-dimensional particle distribution was found in the polymer matrix. However, the shape of the particles in films deposited at higher power density is more elliptic and the particle distribution is two-dimensional. High resolution images demonstrate the structure of single silver particles. By lateral and cross-sectional transmission electron microscopy the size and shape of the encapsulated particles could be reconstructed three-dimensionally.

引用

页码：157 / 165

页数：9

共 13 条

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