Polyelectrolyte hollow sphere lithographic patterning of surfaces: Construction of 2-dimensional well-ordered metal arrays

被引:39
作者
Han, SB [1 ]
Shi, XY [1 ]
Zhou, FM [1 ]
机构
[1] Calif State Univ Los Angeles, Dept Chem & Biochem, Los Angeles, CA 90032 USA
关键词
D O I
10.1021/nl010071b
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Lithographic patterning of interconnected well-ordered metal arrays onto silicon wafers utilizing a 2-dimensional array of poly(diallyldimethylammonium chloride)/poly(sodium 4-styrenesulfonate) thin shells as the template is reported. The polyelectrolyte (PE) thin shells (hollow spheres) were produced by dissolving the polystyrene (PS) sphere cores. Structures of the arrays can be altered by varying the size of the PS spheres. The preparation of such arrays represents an inexpensive lithographic method for the fabrication of a variety of materials.
引用
收藏
页码:97 / 100
页数:4
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