Infiltration and inversion of holographically defined polymer photonic crystal templates by atomic layer deposition

被引：75

作者：

King, Jeffrey S.

Graugnard, Elton

Roche, Olivia M.

Sharp, David N.

Scrimgeour, Jan

Denning, Robert G.

Turberfield, Andrew J.

Summers, Christopher J. ^{[1
]}

机构：

[1] Georgia Inst Technol, Sch Mat Sci & Engn, Atlanta, GA 30332 USA

[2] Univ Oxford, Dept Phys, Oxford OX1 3PU, England

[3] Univ Oxford, Inorgan Chem Lab, Oxford OX1 3QR, England

来源：

ADVANCED MATERIALS | 2006年 / 18卷 / 12期

基金：

英国工程与自然科学研究理事会;

关键词：

D O I：

10.1002/adma.200502287

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Practical methods of microfabrication are vital for the development of photonic-crystal-based signal processing. However, extension of the optical methods that dominate integrated circuit fabrication to three dimensions is challenging. This communication reports an essential step for creation of devices operating within a full photonic band gap: atomic layer deposition is used to create the high-index TiO2 replicas of holographically defined photonic crystals shown in the figure.

引用

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页码：1561 / +

页数：6

相关论文

共 38 条

[1] MORPHOLOGY AND STRUCTURE OF TIO2 THIN-FILMS GROWN BY ATOMIC LAYER DEPOSITION [J].

AARIK, J ;

AIDLA, A ;

UUSTARE, T ;

SAMMELSELG, V .

JOURNAL OF CRYSTAL GROWTH, 1995, 148 (03) :268-275

[2] Thickness dependence of the optical properties of ordered silica-air and air-polymer photonic crystals [J].

Bertone, JF ;

Jiang, P ;

Hwang, KS ;

Mittleman, DM ;

Colvin, VL .

PHYSICAL REVIEW LETTERS, 1999, 83 (02) :300-303

[3] Large-scale synthesis of a silicon photonic crystal with a complete three-dimensional bandgap near 1.5 micrometres [J].

Blanco, A ;

Chomski, E ;

Grabtchak, S ;

Ibisate, M ;

John, S ;

Leonard, SW ;

Lopez, C ;

Meseguer, F ;

Miguez, H ;

Mondia, JP ;

Ozin, GA ;

Toader, O ;

van Driel, HM .

NATURE, 2000, 405 (6785) :437-440

[4] Fabrication of photonic crystals for the visible spectrum by holographic lithography [J].

Campbell, M ;

Sharp, DN ;

Harrison, MT ;

Denning, RG ;

Turberfield, AJ .

NATURE, 2000, 404 (6773) :53-56

[5] PHOTONIC BAND-GAPS IN EXPERIMENTALLY REALIZABLE PERIODIC DIELECTRIC STRUCTURES [J].

CHAN, CT ;

HO, KM ;

SOUKOULIS, CM .

EUROPHYSICS LETTERS, 1991, 16 (06) :563-568

[6] Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication [J].

Cumpston, BH ;

Ananthavel, SP ;

Barlow, S ;

Dyer, DL ;

Ehrlich, JE ;

Erskine, LL ;

Heikal, AA ;

Kuebler, SM ;

Lee, IYS ;

McCord-Maughon, D ;

Qin, JQ ;

Röckel, H ;

Rumi, M ;

Wu, XL ;

Marder, SR ;

Perry, JW .

NATURE, 1999, 398 (6722) :51-54

[7]

DEDMAN ER, UNPUB

[8] Direct laser writing of three-dimensional photonic-crystal templates for telecommunications [J].

Deubel, M ;

Von Freymann, G ;

Wegener, M ;

Pereira, S ;

Busch, K ;

Soukoulis, CM .

NATURE MATERIALS, 2004, 3 (07) :444-447

[9] Atomic layer deposition of Al2O3 films on polyethylene particles [J].

Ferguson, JD ;

Weimer, AW ;

George, SM .

CHEMISTRY OF MATERIALS, 2004, 16 (26) :5602-5609

[10] A kinetic model for step coverage by atomic layer deposition in narrow holes or trenches [J].

Gordon, RG ;

Hausmann, D ;

Kim, E ;

Shepard, J .

CHEMICAL VAPOR DEPOSITION, 2003, 9 (02) :73-78

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