Local control of microdomain orientation in diblock copolymer thin films with electric fields

被引:703
作者
Morkved, TL
Lu, M
Urbas, AM
Ehrichs, EE
Jaeger, HM
Mansky, P
Russell, TP
机构
[1] UNIV CHICAGO,JAMES FRANCK INST,CHICAGO,IL 60637
[2] UNIV CHICAGO,DEPT PHYS,CHICAGO,IL 60637
[3] IBM CORP,ALMADEN RES CTR,DIV RES,SAN JOSE,CA 95120
关键词
D O I
10.1126/science.273.5277.931
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
Local control of the domain orientation in diblock copolymer thin films can be obtained by the application of electric fields on micrometer-length scales. Thin films of an asymmetric polystyrene-polymethylmethacrylate diblock copolymer, with cylindrical polymethylmethacrylate microdomains, were spin-coated onto substrates previously patterned with planar electrodes. The substrates, 100-nanometer-thick silicon nitride membranes, allow direct observation of the electrodes and the copolymer domain structure by transmission electron microscopy. The cylinders aligned parallel to the electric field lines for fields exceeding 30 kilovolts per centimeter, after annealing at 250 degrees C in an inert atmosphere for 24 hours. This technique could find application in nanostructure fabrication.
引用
收藏
页码:931 / 933
页数:3
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