Diffusion modeling of an HF argon plasma discharge in a magnetic field

被引:23
作者
Vidal, F [1 ]
Johnston, TW
Margot, J
Chaker, M
Pauna, O
机构
[1] INRS Energie & Materiaux, Varennes, PQ J3X 1S2, Canada
[2] Univ Montreal, Dept Phys, Montreal, PQ H3C 3J7, Canada
[3] Univ Toulouse 3, CPAT, F-31062 Toulouse, France
基金
加拿大自然科学与工程研究理事会;
关键词
diffusion; discharge; high frequency; plasma; power balance;
D O I
10.1109/27.774677
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
Using the basic moment equations (number density, how density, and energy density) for singly ionized argon and for electrons, a simple diffusion equation (essentially one proposed by Lieberman and Lichtenberg) is adopted (by comparison with experiment), together with an integrated power balance equation. The effects of scaling magnetic field and radius are then discussed first for simple cylinders, for which there are known analytic diffusion solutions. For specific cases having the more complicated geometry of two abutting coaxial cylinders with considerably different radii, the numerical results are well approximated and delimited by considering only the wider cylinder for low magnetic field, and at high magnetic field, where end effects dominate, using the total length and the smallest diameter of the system.
引用
收藏
页码:727 / 745
页数:19
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