Epitaxial growth of Cu(100) and Pt(100) thin films on perovskite substrates

被引:36
作者
Francis, AJ [1 ]
Cao, Y [1 ]
Salvador, PA [1 ]
机构
[1] Carnegie Mellon Univ, Dept Mat Sci & Engn, Pittsburgh, PA 15213 USA
基金
美国国家科学基金会;
关键词
copper(80); platinum(375); physical vapor deposition(370); epitaxy(124);
D O I
10.1016/j.tsf.2005.08.367
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Pulsed laser deposition has been used to grow epitaxially oriented thin films of Cu and Pt on (100)-oriented SrTiO3 and LaAlO3 Substrates. Xray diffraction results illustrated that purely epitaxial Cu(100) films could be obtained at temperatures as low as 100 degrees C on SrTiO3 and 300 degrees C on LaAlO3. In contrast, epitaxial (100)-oriented Pt films were attained on LaAlO3(100) only when deposited at 600 degrees C. Atomic force microscopy images showed that films deposited at higher temperatures consisted of 3D islands and that flat, layered films were obtained at the lowest deposition temperatures. Importantly, Cu films deposited at 100 degrees C on SrTiO3(100) were both purely (100)-oriented and morphologically flat. Pt and Cu films displaying both epitaxial growth and smooth surfaces could be obtained on LaAlO3(100) only by using a three-step deposition process. High-resolution transmission electron microscopy demonstrated an atomically sharp Cu/SrTiO3 interface. The crystalline and morphological features of Cu and Pt films are interpreted in terms of the thermodynamic and kinetic properties of these metals. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码:317 / 325
页数:9
相关论文
共 62 条
[1]   Change of growth orientation in Pt films epitaxially grown on MgO(001) substrates by sputtering [J].
Ahn, KH ;
Baik, S ;
Kim, SS .
JOURNAL OF MATERIALS RESEARCH, 2002, 17 (09) :2334-2338
[2]   ULTRATHIN DEPOSITION OF COPPER ON ROOM-TEMPERATURE SRTIO3(100) [J].
ANDERSEN, JET ;
MOLLER, PJ .
THIN SOLID FILMS, 1990, 186 (01) :137-146
[3]   Thin Pt films on the polar SrTiO3(111) surface:: an experimental and theoretical study [J].
Asthagiri, A ;
Niederberger, C ;
Francis, AJ ;
Porter, LM ;
Salvador, PA ;
Sholl, DS .
SURFACE SCIENCE, 2003, 537 (1-3) :134-152
[4]   Growth, structural and optical properties of Cu3N films [J].
Borsa, DM ;
Boerma, DO .
SURFACE SCIENCE, 2004, 548 (1-3) :95-105
[5]   Ultrathin metal films and particles on oxide surfaces: Structural, electronic and chemisorptive properties [J].
Campbell, CT .
SURFACE SCIENCE REPORTS, 1997, 27 (1-3) :1-111
[6]   FORMATION OF COPPER SILICIDES FROM CU(100)/SI(100) AND CU(111)/SI(111) STRUCTURES [J].
CHANG, CA .
JOURNAL OF APPLIED PHYSICS, 1990, 67 (01) :566-569
[7]   Equilibrium shape of copper crystals grown on sapphire [J].
Chatain, D ;
Ghetta, V ;
Wynblatt, P .
INTERFACE SCIENCE, 2004, 12 (01) :7-18
[8]  
CHOW PC, 1997, MATER RES SOC S P, V440, P359
[9]   PULSED LASER DEPOSITION OF HETEROEPITAXIAL THIN PT FILMS ON MGO(100) [J].
CILLESSEN, JFM ;
WOLF, RM ;
DELEEUW, DM .
THIN SOLID FILMS, 1993, 226 (01) :53-58
[10]   HIGH ANISOTROPY L1(0) THIN-FILMS FOR LONGITUDINAL RECORDING [J].
COFFEY, KR ;
PARKER, MA ;
HOWARD, JK .
IEEE TRANSACTIONS ON MAGNETICS, 1995, 31 (06) :2737-2739