Operational methods for improving manufacturing control plans: case study in a semiconductor industry

被引：14

作者：

Bassetto, Samuel ^{[1
]}

Siadat, Ali ^{[2
]}

机构：

[1] CNRS, G SCOP, F-38000 Grenoble, France

[2] LGIPM, F-57078 Metz 3, France

来源：

JOURNAL OF INTELLIGENT MANUFACTURING | 2009年 / 20卷 / 01期

关键词：

Control plan update; Product process tool links; Manufacturing process control; Robust control; DESIGN;

D O I：

10.1007/s10845-008-0103-7

中图分类号：

TP18 [人工智能理论];

学科分类号：

081104 ; 0812 ; 0835 ; 1405 ;

摘要：

This study presents operational methods which improves tools control plan. To face challenges linked with quality, cost, cycle time, development and environment, semiconductors industries set classical process control methods. However many interactions between product-processes and tools are not exploited in practice for fine tuning controls operations and detecting premises of non conformities occurrences.

引用

页码：55 / 65

页数：11

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