Fracture anisotropy in silicon single crystal

被引:181
作者
Ebrahimi, F [1 ]
Kalwani, L [1 ]
机构
[1] Univ Florida, Dept Mat Sci & Engn, Gainesville, FL 32611 USA
来源
MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING | 1999年 / 268卷 / 1-2期
关键词
indentation fracture; single crystal; silicon; pre-straining;
D O I
10.1016/S0921-5093(99)00077-5
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
In this study the effect of crystallographic orientation on fracture toughness and the fracture path of silicon single crystal was investigated. Vickers microhardness indentation was used to introduce cracks along various crystallographic orientations on the (110), (001), and (<1(1)over bar>1) planes. The fracture toughness variation was found to follow the symmetry of the indentation axis with no distinct correlation with the elastic constants. The observations made suggest that the inclination angle of cleavage planes relative to the indent plane affects the fracture path and toughness significantly. Prestraining decreased the hardness and improved the toughness without a modification of fracture path. (C) 1999 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:116 / 126
页数:11
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