Noncoplanar organic field-effect transistor based on copper phthalocyanine

被引:13
作者
Di, CA
Yu, G [1 ]
Liu, YQ
Xu, XJ
Song, YB
Wang, Y
Sun, YM
Zhu, DB
Liu, HM
Liu, XY
Wu, DX
机构
[1] Chinese Acad Sci, Inst Chem, Key Lab Organ Solids, Beijing 100080, Peoples R China
[2] Chinese Acad Sci, Inst Microelect, Beijing 100010, Peoples R China
基金
中国国家自然科学基金;
关键词
D O I
10.1063/1.2182016
中图分类号
O59 [应用物理学];
学科分类号
摘要
We present a method of fabricating noncoplanar channel organic field-effect transistors (OFETs) by a conventional photolithographic technique. Using this method, OFETs with micrometer critical features in slanting configurations and submicrometer critical features in vertical configurations were fabricated. The critical channel length over 1 mu m was controlled by the patterning technique, while the one of 0.5 mu m was defined by the thickness of an insulating layer between the drain and source electrodes. Also, we demonstrate that the OFETs containing two different metals as source and drain electrodes, respectively, are easily realized. All the OFETs based on copper phthalocyanine exhibit a high performance.
引用
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页数:3
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