A new quantitative model to predict SILC-related disturb characteristics in Flash E(2)PROM devices

被引:29
作者
DeBlauwe, J
VanHoudt, J
Wellekens, D
Degraeve, R
Roussel, P
Haspeslagh, L
Deferm, L
Groeseneken, G
Maes, HE
机构
来源
IEDM - INTERNATIONAL ELECTRON DEVICES MEETING, TECHNICAL DIGEST 1996 | 1996年
关键词
D O I
10.1109/IEDM.1996.553599
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A new quantitative model is developed that allows an excellent prediction of the disturb behavior of tunnel oxide Flash E(2)PROM devices after write/erase cycling and provides a well-understood and consistent cell optimization procedure. This model requires as only input a measurement of the oxide quality on capacitors and transistors, and some basic cell characteristics.
引用
收藏
页码:343 / 346
页数:4
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