A study on initial contact detection for precision micro-mold and surface generation of vertical side walls in micromachining

被引:28
作者
Min, S. [1 ]
Sangermann, H. [2 ]
Mertens, C. [2 ]
Dornfeld, D. [1 ]
机构
[1] Univ Calif Berkeley, Lab Mfg & Sustainabil, Berkeley, CA 94720 USA
[2] Univ Aachen, Rhein Westfal TH Aachen, Lab Machine Tools & Prod Engn WZL, D-5100 Aachen, Germany
关键词
micromachining; surface; acoustic emission;
D O I
10.1016/j.cirp.2008.03.068
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The surface quality and the dimensional accuracy are important criteria for micro-mold production, specially for micro-fluidic devices. important cutting parameters that affect the quality of vertical side walls created by the peripheral cutting edge in micro-end-milling operations were identified. Surface roughness and form error were used to define the quality of side walls on stainless steel and aluminum workpieces. An acoustic emission sensor was used to detect initial contact between a tool and a workpiece for higher dimensional accuracy where the referencing is a critical element for precision micromachining feature creation. (c) 2008 CIRP.
引用
收藏
页码:109 / 112
页数:4
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