Thermal decomposition products in arc evaporated TiAlN/TiN multilayers

被引：70

作者：

Knutsson, A. ^{[1
]}

Johansson, M. P. ^{[2
]}

Persson, P. O. A. ^{[1
]}

Hultman, L. ^{[1
]}

Oden, M.

机构：

[1] Linkoping Univ, Dept Phys Chem & Biol, IFM, Thin Film Phys Div, SE-58183 Linkoping, Sweden

[2] Seco Tools AB, SE-73782 Fagersta, Sweden

来源：

APPLIED PHYSICS LETTERS | 2008年 / 93卷 / 14期

基金：

瑞典研究理事会;

关键词：

D O I：

10.1063/1.2998588

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Cubic metastable Ti(0.34)Al(0.66)N/TiN multilayers were grown by reactive arc evaporation using Ti(33)-Al(67) and Ti cathodes in a N(2) atmosphere. X-ray diffractometry and high resolution transmission electron microscopy revealed that metastable c-Ti(0.34)Al(0.66)N partly decomposes after annealing at 900 degrees C into c-TiN rich and c-AlN rich phases with retained lattice coherency. Elemental mapping by energy dispersive x-ray spectroscopy showed a homogenous distribution of Ti and Al in the as-deposited 25 nm Ti(0.34)Al(0.66)N layers. The annealed Ti(0.34)Al(0.66)N layers exhibited coherent 5 nm domains with high Al content surrounded by a high Ti content matrix. This nanostructure formation is discussed in terms of spinodal decomposition. (C) 2008 American Institute of Physics. [DOI: 10.1063/1.2998588]

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