Scattering study on the selective solvent swelling induced surface reconstruction

被引:74
作者
Xu, T
Goldbach, JT
Misner, MJ
Kim, S
Gibaud, A
Gang, O
Ocko, B
Guarini, KW
Black, CT
Hawker, CJ
Russell, TP [1 ]
机构
[1] Univ Massachusetts, Dept Polymer Sci & Engn, Amherst, MA 01003 USA
[2] Univ Maine, Fac Sci, F-72085 Le Mans 09, France
[3] Brookhaven Natl Lab, Dept Phys, Upton, NY 11973 USA
[4] IBM Corp, TJ Watson Res Ctr, Yorktown Hts, NY 10598 USA
[5] IBM Corp, Almaden Res Ctr, San Jose, CA 95120 USA
关键词
D O I
10.1021/ma0355204
中图分类号
O63 [高分子化学(高聚物)];
学科分类号
070305 ; 080501 ; 081704 ;
摘要
A selective solvent induced surface reconstruction of thin films of an asymmetric diblock copolymer of polystyrene-b-methyl methacrylate) was investigated by grazing incidence small-angle X-ray scattering, X-ray reflectivity, and atomic force microscopy. It is quantitatively shown that the selective swelling of the minor component results in the formation of a nanoporous film where the initial hexagonal array of the copolymer is preserved without affecting the lattice constant, 40.7 nm. However, the film thickness increased by similar to17%, and the average electron density decreased by similar to20%. The electron density profiles obtained by fitting the X-ray reflectivity indicate that the pores penetrate through the entire film and that the pores are oriented normal to the surface.
引用
收藏
页码:2972 / 2977
页数:6
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