ZnO diode fabricated by excimer-laser doping

被引:732
作者
Aoki, T
Hatanaka, Y
Look, DC
机构
[1] Shizuoka Univ, Elect Res Inst, Hamamatsu, Shizuoka 4328011, Japan
[2] Wright State Univ, Semicond Res Ctr, Dayton, OH 45435 USA
关键词
D O I
10.1063/1.126599
中图分类号
O59 [应用物理学];
学科分类号
摘要
A ZnO diode was fabricated by using a laser-doping technique to form a p-type ZnO layer on an n-type ZnO substrate. A zinc-phosphide compound, used as a phosphorous source, was deposited on the ZnO wafer and subjected to excimer-laser pulses. The current-voltage characteristics showed a diode characteristic between the phosphorous-doped p-layer and the n-type substrate. Moreover, light emission, with a band-edge component, was observed by forward current injection at 110 K. (C) 2000 American Institute of Physics. [S0003-6951(00)02722-4].
引用
收藏
页码:3257 / 3258
页数:2
相关论文
共 11 条
  • [1] Aoki T, 1998, BLUE LASER AND LIGHT EMITTING DIODES II, P78
  • [2] Surface processing of CdTe compound semiconductor by excimer laser doping
    Hatanaka, Y
    Niraula, M
    Aoki, Y
    Aoki, T
    Nakanishi, Y
    [J]. APPLIED SURFACE SCIENCE, 1999, 142 (1-4) : 227 - 232
  • [3] Heavily doped p-type ZnSe layer formation by excimer laser doping
    Hatanaka, Y
    Aoki, T
    Arakawa, T
    Noda, D
    Nakanishi, Y
    [J]. JOURNAL OF CRYSTAL GROWTH, 1998, 184 : 425 - 428
  • [4] ELECTRON SPIN RESONANCE STUDIES OF DONORS AND ACCEPTORS IN ZNO
    KASAI, PH
    [J]. PHYSICAL REVIEW, 1963, 130 (03): : 989 - &
  • [5] Excimer laser doping technique for application in an integrated CdTe imaging device
    Mochizuki, D
    Niraula, M
    Aoki, T
    Tomita, Y
    Nihashi, T
    Hatanaka, Y
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1999, 436 (1-2) : 127 - 131
  • [6] MOCHIZUKI D, IN PRESS J CRYST GRO
  • [7] SUSCAVAGE M, 1999, MRS INTERNET J NITRI
  • [8] Vanheusden K, 1996, APPL PHYS LETT, V68, P403, DOI 10.1063/1.116699
  • [9] Mechanisms behind green photoluminescence in ZnO phosphor powders
    Vanheusden, K
    Warren, WL
    Seager, CH
    Tallant, DR
    Voigt, JA
    Gnade, BE
    [J]. JOURNAL OF APPLIED PHYSICS, 1996, 79 (10) : 7983 - 7990
  • [10] Dynamics of photoexcited carriers in ZnO epitaxial thin films
    Yamamoto, A
    Kido, T
    Goto, YF
    Chen, Y
    Yao, T
    Kasuya, A
    [J]. APPLIED PHYSICS LETTERS, 1999, 75 (04) : 469 - 471