Light enhanced gas sensing properties of indium oxide and tin dioxide sensors

被引:203
作者
Comini, E [1 ]
Cristalli, A [1 ]
Faglia, G [1 ]
Sberveglieri, G [1 ]
机构
[1] Univ Brescia, INFM, Dept Chem & Phys Mat, Gas Sensor Lab, I-25133 Brescia, Italy
关键词
gas sensor; SnO2; In2O3; photoadsorption;
D O I
10.1016/S0925-4005(99)00350-0
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
The effects of UV light illumination on the performance of SnO2 and In2O3 semiconductor gas sensors toward CO and NO2 are reported. The sample were prepared with DC sputtering in Ar atmospheres by the Rheotaxial Growth and Thermal Oxidation (RGTO) technique and with reactive magnetron sputtering in Ar and O-2 atmosphere, respectively. Results are quite promising for the development of sensor working at room temperature. (C) 2000 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:260 / 263
页数:4
相关论文
共 7 条
  • [1] MORRISON SR, 1977, CHEM PHYSICS SURFACE
  • [2] ROMEROROSSI, 1960, 2 C INT CAT
  • [3] A NEW TECHNIQUE FOR GROWING LARGE SURFACE-AREA SNO2 THIN-FILM (RGTO TECHNIQUE)
    SBERVEGLIERI, G
    FAGLIA, G
    GROPPELLI, S
    NELLI, P
    CAMANZI, A
    [J]. SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1990, 5 (12) : 1231 - 1233
  • [4] BISMUTH-DOPED TIN OXIDE THIN-FILM GAS SENSORS
    SBERVEGLIERI, G
    GROPPELLI, S
    NELLI, P
    CAMANZI, A
    [J]. SENSORS AND ACTUATORS B-CHEMICAL, 1991, 3 (03) : 183 - 189
  • [5] CHEMISORPTION, PHOTODESORPTION AND CONDUCTIVITY MEASUREMENTS ON ZNO SURFACES
    SHAPIRA, Y
    COX, SM
    LICHTMAN, D
    [J]. SURFACE SCIENCE, 1976, 54 (01) : 43 - 59
  • [6] PHOTODESORPTION FROM POWDERED ZINC-OXIDE
    SHAPIRA, Y
    COX, SM
    LICHTMAN, D
    [J]. SURFACE SCIENCE, 1975, 50 (02) : 503 - 514
  • [7] SHAPIRA Y, 1977, PHYS REV B, V15