XPS characterization of xα-Fe2O3-(1-x)ZrO2 for oxygen gas sensing application

被引:50
作者
Cao, W
Tan, OK
Pan, JS
Zhu, W
Reddy, CVG
机构
[1] Nanyang Technol Univ, Ctr Microelect, Sch EEE, Singapore 639798, Singapore
[2] Inst Mat Res & Engn, Singapore 117602, Singapore
关键词
XPS; oxygen vacancy; oxygen gas sensor;
D O I
10.1016/S0254-0584(02)00032-9
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
XPS characterization was carried out for the solid-solution xalpha-Fe2O3-(1-x)ZrO2 which is a potential low temperature oxygen gas sensing, material. The significant variation of relative intensity of the two peaks in 0 Is spectra provides us a unique way to estimate the oxygen vacancy concentrations of xalpha-Fe2O3-(1-x)ZrO2 with x ranging from 0 to 0.3. The estimation result from XPS coincides with the calculated values from the substitutional model. The relationship between the sensitivity of the fabricated oxygen gas sensor and the oxygen vacancy concentration in the sensing material was established. (C) 2002 Elsevier Science B.V. All lights reserved.
引用
收藏
页码:67 / 70
页数:4
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