A MEMS-based piezoelectric power generator for low frequency vibration energy harvesting

被引：38

作者：

Fang, HB

Liu, JQ ^{[1
]}

Xu, ZY

Dong, L

Chen, D

Cai, BC

Liu, Y

机构：

[1] Shanghai Jiao Tong Univ, Inst Micro Nano Sci & Technol, Natl Key Lab Micro Nano Fabricat, Key Lab Thim Film & Micro Fabricat,Minist Educ, Shanghai 200030, Peoples R China

[2] Honeywell Co, ACS Sensors Lab, Shanghai 201203, Peoples R China

来源：

CHINESE PHYSICS LETTERS | 2006年 / 23卷 / 03期

关键词：

Piezoelectricity;

D O I：

10.1088/0256-307X/23/3/057

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

A novel power generator has been achieved to convert vibration to electrical energy via the piezoelectric effect. The generator obtained by micro fabrication process mainly consists of silicon based Frame and composite cantilever. The prototype tested at resonant vibration generates 1.15 mu W of effective power to a 20.4-k Omega resistance load. The potential of this work is to offer miniaturization solutions for power generators, and with the proposed method the ambient ubiquitous vibration can be harvested effectively as endless energy source to form an integrated self-powering system.

引用

页码：732 / 734

页数：3

共 12 条

[1] Self-powered signal processing using vibration-based power generation [J].

Amirtharajah, R ;

Chandrakasan, AP .

IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1998, 33 (05) :687-695

[2]

CHANDRAKASAN A, 1998, P 1998 IEEE INT S CI, P2013

[3] Thickness-dependent microstructures and electrical properties of PZT films derived from sol-gel process [J].

Cheng, JR ;

Meng, ZY .

THIN SOLID FILMS, 2001, 385 (1-2) :5-10

[4] Towards a piezoelectric vibration-powered microgenerator [J].

Glynne-Jones, P ;

Beeby, SP ;

White, NM .

IEE PROCEEDINGS-SCIENCE MEASUREMENT AND TECHNOLOGY, 2001, 148 (02) :68-72

[5] MEMS power generator with transverse mode thin film PZT [J].

Jeon, YB ;

Sood, R ;

Jeong, JH ;

Kim, SG .

SENSORS AND ACTUATORS A-PHYSICAL, 2005, 122 (01) :16-22

[6]

JONES PG, 2001, P 11 INT C SOL STAT, V15, P46

[7] Vibration-to-electric energy conversion [J].

Meninger, S ;

Mur-Miranda, JO ;

Amirtharajah, R ;

Chandrakasan, AP ;

Lang, JH .

IEEE TRANSACTIONS ON VERY LARGE SCALE INTEGRATION (VLSI) SYSTEMS, 2001, 9 (01) :64-76

[8] A study of low level vibrations as a power source for wireless sensor nodes [J].

Roundy, S ;

Wright, PK ;

Rabaey, J .

COMPUTER COMMUNICATIONS, 2003, 26 (11) :1131-1144

[9] Improving power output for vibration-based energy scavengers [J].

Roundy, S ;

Leland, ES ;

Baker, J ;

Carleton, E ;

Reilly, E ;

Lai, E ;

Otis, B ;

Rabaey, JM ;

Wright, PK ;

Sundararajan, V .

IEEE PERVASIVE COMPUTING, 2005, 4 (01) :28-36

[10]

SOOD RK, 2003, THESIS MITRIC, P19

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