Lanthanum-substituted bismuth titanate for use in non-volatile memories

被引:2240
作者
Park, BH
Kang, BS
Bu, SD
Noh, TW [1 ]
Lee, J
Jo, W
机构
[1] Seoul Natl Univ, Dept Phys, Seoul 151742, South Korea
[2] Seoul Natl Univ, Condensed Matter Res Inst, Seoul 151742, South Korea
[3] Sungkyunkwan Univ, Dept Mat Engn, Suwon 440746, South Korea
[4] LG Corp Inst Technol, Seoul 137140, South Korea
关键词
D O I
10.1038/44352
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
Non-volatile memory devices are so named because they retain information when power is interrupted; thus they are important computer components. In this context, there has been considerable recent interest(1,2) in developing non-volatile memories that use ferroelectric thin films-'ferroelectric random access memories: or FRAMs-in which information is stored in the polarization state of the ferroelectric material. To realize a practical FRAM, the thin films should satisfy the following criteria: compatibility with existing dynamic random access memory technologies, large remnant polarization (P-r) and reliable polarization-cycling characteristics. Early work focused on lead zirconate titanate (PZT) but, when films of this material were grown on metal electrodes, they generally suffered from a reduction of P-r ('fatigue') with polarity switching. Strontium bismuth tantalate (SBT) and related oxides have been proposed to overcome the fatigue problem(3), but such materials have other shortcomings, such as a high deposition temperature. Here we show that lanthanum-substituted bismuth titanate thin films provide a promising alternative for FRAM applications. The films are fatigue-free on metal electrodes, they can be deposited at temperatures of similar to 650 degrees C and their values of P-r are larger than those of the SBT films.
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页码:682 / 684
页数:3
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