Patterning for planar waveguides

被引：2

作者：

Ballato, J

vanWeeren, R

Agarwala, M

Riman, RE

Danforth, SC

机构：

[1] Rutgers, State Univ. of New Jersey, Dept. of Ceram. Sci. and Engineering, Piscataway, NJ 08855-0909, Brett and Bowser Roads

来源：

ELECTRONICS LETTERS | 1997年 / 33卷 / 01期

关键词：

planar waveguides;

D O I：

10.1049/el:19970034

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The synthesis of planar strip geometries for planar waveguides by a layered manufacturing technique, called fused deposition modelling (FDM(TM)), is presented. Channels were deposited on silicon wafers by melting a thermoplastic polymer and extruding it through a small orifice. Sol-gel-derived, amorphous fluoride films were dip-coated into these channels and yielded straight, 1mm strips on subsequent removal of the polymer.

引用

页码：83 / 84

页数：2