Eigenfrequencies of a rectangular atomic force microscope cantilever in a medium

被引:78
作者
Elmer, FJ
Dreier, M
机构
[1] Institut für Physik, Universität Basel
关键词
D O I
10.1063/1.365379
中图分类号
O59 [应用物理学];
学科分类号
摘要
We calculate the eigenfrequencies of a rectangular cantilever of an atomic force microscope immersed in a fluid or a gas. To do so, the problem of combined elastomechanical and hydrodynamical equations is solved approximatively. The results are compared with experimentally obtained frequencies. For water the difference between experiment and theory is less than 4% if the ratio of the height of the cantilever to the width is less than 1/20 and if the corresponding eigenmode has at least four nodes. (C) 1997 American Institute of Physics.
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页码:7709 / 7714
页数:6
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