Transparent p-type conducting indium-doped SnO2 thin films deposited by spray pyrolysis

被引：81

作者：

Ji, Z ^{[1
]}

Zhao, L ^{[1
]}

He, ZP ^{[1
]}

Zhou, Q ^{[1
]}

Chen, C ^{[1
]}

机构：

[1] Zhejiang Univ, State Key Lab Silicon Mat, Hangzhou 310027, Peoples R China

来源：

MATERIALS LETTERS | 2006年 / 60卷 / 11期

基金：

中国国家自然科学基金;

关键词：

SnO2; spray pyrolysis; p-type doping;

D O I：

10.1016/j.matlet.2005.11.057

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Tansparent p-type conducting indiurn-doped SnO2 thin films were successfully prepared by spray pyrolysis. The films were characterized by X-ray diffraction, Hall effect, and UV-Visible absorption spectra. The results showed that for films with In/Sn ratio less than 0.3, the films were rutile structure of SiO2, while for filin with In/Sn ratio of 0.4, peaks from In2O3 were observed. Hall effect measurement showed that the conducting type was dependent on both the process temperature and In/Sn ratio. For the films with In/Sn ratio=0.1 and 0.2, and process temperatures T >= 600 degrees C, the films were p-type, while for T < 600 degrees C, the films were n-type. For the films processed at the same temperature (T=700 degrees C), the films were n-type if In/Sn > 0.2, and the films were p-type when In/Sn <= 0.2. In addition, UV-Vis absorption spectra showed no shift of the absorption edge when doped by indium for In/Sn ratio < 0.4. (c) 2005 Elsevier B.V. All rights reserved.

引用

页码：1387 / 1389

页数：3

共 11 条

[1] Compositional analysis and depth profile studies on undoped and doped tin oxide films prepared by spray technique [J].

Amanullah, FM ;

Pratap, KJ ;

Babu, VH .

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1998, 52 (2-3) :93-98

[2] Calculation of the electronic and optical properties of indium tin oxide by density functional theory [J].

Brewer, SH ;

Franzen, S .

CHEMICAL PHYSICS, 2004, 300 (1-3) :285-293

[3] Optical properties of SnO2 thin films grown by atmospheric pressure chemical vapour deposition oxidizing SnCl4 [J].

Davazoglou, D .

THIN SOLID FILMS, 1997, 302 (1-2) :204-213

[4] Fabrication and characterization of indium-doped p-type SnO2 thin films [J].

Ji, ZG ;

He, ZJ ;

Song, YL ;

Liu, K ;

Ye, ZZ .

JOURNAL OF CRYSTAL GROWTH, 2003, 259 (03) :282-285

[5] Effect of substrate temperature on structural, electrical and optical properties of sprayed tin oxide (SnO2) thin films [J].

Patil, PS ;

Kawar, RK ;

Seth, T ;

Amalnerkar, DP ;

Chigare, PS .

CERAMICS INTERNATIONAL, 2003, 29 (07) :725-734

[6] Microstructure and properties of indium tin oxide films produced by electrostatic spray assisted vapour deposition process [J].

Raj, ES ;

Choy, KL .

MATERIALS CHEMISTRY AND PHYSICS, 2003, 82 (02) :489-492

[7] Highly conducting and transparent sprayed indium tin oxide [J].

Rami, M ;

Benamar, E ;

Messaoudi, C ;

Sayah, D ;

Ennaoui, A .

EUROPEAN JOURNAL OF SOLID STATE AND INORGANIC CHEMISTRY, 1998, 35 (03) :211-219

[8] Experimental determination of the electronic band structure of SnO2 [J].

Reimann, K ;

Steube, M .

SOLID STATE COMMUNICATIONS, 1998, 105 (10) :649-652

[9]

SEKHAR CR, 1997, THIN SOLID FILMS J, V307, P221

[10] Optical indices of pyrolytic tin-oxide glass [J].

vonRottkay, K ;

Rubin, M .

THIN FILMS FOR PHOTOVOLTAIC AND RELATED DEVICE APPLICATIONS, 1996, 426 :449-454

← 1 2 →