Development of an Er-Ni liquid alloy ion source

被引：16

作者：

Chao, LC ^{[1
]}

Steckl, AJ ^{[1
]}

机构：

[1] Univ Cincinnati, Nanoelect Lab, Cincinnati, OH 45221 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1999年 / 17卷 / 03期

关键词：

D O I：

10.1116/1.590692

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We have developed a procedure for the fabrication of Er-Ni liquid alloy ion sources. The source is tested and analyzed in a MicroBeam 150 focused ion beam system. Our experimental results show that an Er2+ target current of 95-100 pA was produced, representing 50% of the total target current. The ion emission current-voltage slope is similar to 36 mu A/kV. Source lifetimes are generally larger than 20 h. The alloy oxidizes quickly once it is exposed to air. This must be minimized to ensure proper source performance. (C) 1999 American Vacuum Society. [S0734-211X(99)04303-6].

引用

页码：1056 / 1058

页数：3

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