Microscratch test studies of thin silica films on stainless steel substrates

被引：22

作者：

Benayoun, S ^{[1
]}

Fouilland-Paillé, L ^{[1
]}

Hantzpergue, JJ ^{[1
]}

机构：

[1] ENSAM, Lab Physicochim Surfaces, F-49035 Angers, France

来源：

THIN SOLID FILMS | 1999年 / 352卷 / 1-2期

关键词：

adhesion; hardness; coatings; silicon dioxide (SiO2);

D O I：

10.1016/S0040-6090(99)00319-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Silica coatings 0.66 mu m thick were deposited by plasma enhanced chemical vapor deposition on stainless steel. The coating adhesion has been modified by using different pretreatments on the substrates. Microscratches, scratch-indentations and Rockwell indentations were produced with different tips. Mechanical behavior, damage and adhesion of hard and brittle thin ceramic coatings on soft and ductile metallic substrates were investigated and interpreted. Track width versus applied load was plotted. Results were compared with different models. Critical load is especially determined by an in increasing load mode with 0.2 mm radius indenter. According to the Benjamin and Weaver model, sequential surface substrate pretreatment in hydrogen and oxygen plasmas increases adhesion of the coatings up to 25%. (C) 1999 Elsevier Science S.A. All rights reserved.

引用

页码：156 / 166

页数：11

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