Performance of a compact, hybrid optical evanescent-wave sensor for chemical and biological applications

We describe a hybrid evanescent-wave sensor component that we fabricated by using an integrated optical interferometer with a specially adapted photodetector array. The design of the interferometer is based on the use of tapered waveguides to obtain two intersecting collimated beams. Phase shifts can be measured with an angular precision of better than 10(-3) rad, which corresponds to a superstrate index change inferior of 10(-6) with our structure. The interest in the device as a chemical sensor is experimentally demonstrated. The same optical component could be used in a variety of other sensor applications, e.g., biological and immunological sensors. (C) 1996 Optical Society of America