Self-aligned silicon tips coated with diamondlike carbon

被引：18

作者：

Lee, S

Jeon, D

Lee, KR

机构：

[1] MYONG JI UNIV, DEPT PHYS, SEOUL 449728, SOUTH KOREA

[2] KOREA INST SCI & TECHNOL, DIV CERAM, SEOUL 130650, SOUTH KOREA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1997年 / 15卷 / 02期

关键词：

D O I：

10.1116/1.589598

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Silicon field emitter tips are coated with diamondlike carbon (DLC) film. Argon-ion bombardment of the tips increased the aspect ratio and helped uniform DLC coating. Using DLC-coated tips, we have fabricated a self-aligned gated field emission array. (C) 1997 American Vacuum Society.

引用

页码：457 / 459

页数：3

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