Surface layer destruction during ion beam analysis

被引：11

作者：

Behrisch, R

von der Linden, W

von Toussaint, U

Grambole, D

机构：

[1] Max Planck Inst Plasma Phys, EURATOM Assoc, D-85748 Garching, Germany

[2] Graz Univ Technol, Inst Theoret Phys, A-8010 Graz, Austria

[3] Rossendorf Inc, Forschungszentrum Rossendorf EV, Inst Ionenstrahlphys & Mat Forsch, D-01314 Dresden, Germany

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1999年 / 155卷 / 04期

关键词：

D O I：

10.1016/S0168-583X(99)00491-7

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

In ion beam analysis the decrease of the measuring signal with a number of incident ions, due to a destruction of the surface layer being analysed, depends critically on the lateral intensity distribution in the analysing ion beam. For the assumption of destruction in one step, the decrease was calculated and the obtained analytical formulae was fitted to the decrease as measured in ERDA and PIXE analyses. This allows to obtain values for the destruction cross sections for the ions and the samples in the analysis, as well as information about the lateral intensity distribution in the analysing ion beam. (C) 1999 Elsevier Science B.V. All rights reserved.

引用

页码：440 / 446

页数：7

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