Assembled corner-cube retroreflector quadruplet

被引：11

作者：

Zhou, LX ^{[1
]}

Pister, KSJ ^{[1
]}

Kahn, JM ^{[1
]}

机构：

[1] Univ Calif Berkeley, Dept Elect Engn & Comp Sci, Berkeley, CA 94720 USA

来源：

FIFTEENTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2002年

关键词：

D O I：

10.1109/MEMSYS.2002.984332

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A MEMS corner-cube retroreflector (CCR) is presented. It is used as the free-space optical communication transmitter in the Smart Dust project. The optical and electrical properties are greatly improved as compared to CCRs fabricated [1, 21 previously in the MUMPS process Improvements include a tenfold improvement in mirror curvature, a threefold reduction of mirror misalignment, a fivefold reduction of drive voltage, a tenfold increase in resonant frequency, and an improved scalability due to the quadruplet design.

引用

页码：556 / 559

页数：4

共 4 条

[1] Optical communication using micro corner cube reflectors [J].

Chu, PB ;

Lo, NR ;

Berg, EC ;

Pister, KSJ .

MEMS 97, PROCEEDINGS - IEEE THE TENTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND ROBOTS, 1997, :350-355

[2]

Doherty L., 2001, International Journal of Parallel and Distributed Systems & Networks, V4, P121

[3]

HSU VS, 1999, THESIS U C BERKELEY

[4]

ZHU X, 2000, UNPUB IEEE J SEL JUL

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