Fabrication of carbon coated ceramic membranes by pyrolysis of methane using a modified chemical vapor deposition apparatus

An 80-cm long tubular carbon coated membrane was fabricated by chemical vapor deposition (CVD) of methane on a multilayered porous ceramic substrate at a temperature of 1000 degreesC. The deposition of pyrocarbon on the membrane generated a carbon film, the nature of which not only reduced the pore size of the membrane but also changed the physical properties of the membrane, including its hydrophobicity, electrical conductivity, and thermal conductivity. To ensure a uniform deposition of carbon on the membrane, a CVD apparatus equipped with process piping was employed to periodically reverse the direction of the gas flow in the reactor. The CVD experiments were then conducted by varying parameters such as the rate of flow of the gas mixture (methane and nitrogen), the percentage concentration of methane, and so on. To analyze the uniformity of the carbon film, we measured the electrical resistance of the membrane and the permeation of six gases through the sectioned membranes. In the range of our study, it was found that the flow rate of the gas mixture and the alternation of the direction of the gas flow were two important factors for determining the uniformity of the carbon deposit in the membranes. Observation by scanning electron microscope (SEM) and measurement of the nitrogen permeation of the membranes revealed that fabrication of uniform carbon coated ceramic membranes with a desired pore size is possible for applications involving microfiltration, ultrafiltration, and nanofiltration. In addition, the utilization of the superior properties of the membranes such as hydrophobicity and electrical conductivity were suggested for enhancing the degree of separation of the membranes. (C) 2002 Elsevier Science B.V. All rights reserved.