Synthesis of uniformly distributed carbon nanotubes on a large area of Si substrates by thermal chemical vapor deposition

We have synthesized carbon nanotubes by thermal chemical vapor deposition of C2H2 on transition metal-coated silicon substrates. Multiwalled carbon nanotubes are uniformly synthesized on a large area of the plain Si substrates, different from previously reported porous Si substrates. It is observed that surface modification of transition metals deposited on substrates by either etching with dipping in a HF solution and/or NH3 pretreatment is a crucial step for the nanotube growth prior to the reaction of C2H2 gas. We will demonstrate that the diameters of carbon nanotubes can be controlled by applying the different transition metals. (C) 1999 American Institute of Physics. [S0003-6951(99)03438-5].