共 6 条
[1]
BEHFARRAD A, 1990, P IEDM, V6, P1
[4]
SELF-ALIGNED DRY-ETCHING PROCESS FOR WAVE-GUIDE DIODE RING LASERS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1994, 12 (05)
:2929-2932
[5]
LIANG JJ, 1994, LEOS 94 C P, V2, P393