Simultaneous measurements of liquid properties using multichannel shear horizontal surface acoustic wave microsensor

被引：62

作者：

Kondoh, J ^{[1
]}

Saito, K ^{[1
]}

Shiokawa, S ^{[1
]}

Suzuki, H ^{[1
]}

机构：

[1] FUJI ULTRASON ENG CO LTD, HAMAMATSU, SHIZUOKA 432, JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 1996年 / 35卷 / 5B期

关键词：

SH-SAW; multichannel SH-SAW sensor; viscosity; conductivity; permittivity; liquid characterization;

D O I：

10.1143/JJAP.35.3093

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Surface acoustic waves (SAW) with a shear horizontal polarized displacement (SH-SAW) can be used to determine mechanical and electrical properties of an adjacent liquid. We propose a new multichannel SH-SAW microsensor for liquid characterization. The SH-SAW microsensor, which is fabricated on 36 degrees rotated Y-cut X-propagating LiTaO3, consists of three SAW delay lines. The propagating surfaces of two of the delay lines are metallized and electrically shorted, and the other one has a free surface which is an electrically active area. The viscosity, conductivity and permittivity of liquid are obtained simultaneously using the multichannel SH-SAW microsensor.

引用

页码：3093 / 3096

页数：4