Effect of Cu on the structure and magnetic properties of FePt sputtered film

被引:136
作者
Takahashi, YK [1 ]
Ohnuma, M [1 ]
Hono, K [1 ]
机构
[1] Natl Inst Mat Sci, Mat Engn Lab, Tsukuba, Ibaraki 3050047, Japan
关键词
thin film; ordering; sputtering; coercivity; microstructure;
D O I
10.1016/S0304-8853(02)00065-3
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We have investigated the effect of Cu addition to the FePt alloy on the ordering kinetics and the coercivities of sputter deposited thin films. By alloying 4 at% Cu, the temperature that A1 phase orders to the L1(0) structure decrease from 500degreesC to 400degreesC. The lattice parameters of the L1(0)-ordered phase suggest that Fe atoms are substituted by Cu. The grain size increases by the addition of Cu, suggesting that the decrease of the annealing temperature for ordering is due to the enhanced kinetics of ordering as a result of higher diffusivity obtained from the alloy with the lower melting temperature. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:259 / 265
页数:7
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