Preparation and characterization of Pd and Pd-Ni alloy membranes on porous substrates by MOCVD with mixed metal beta-diketone precursors

被引:24
作者
Meng, GY [1 ]
Huang, L [1 ]
Pan, M [1 ]
Chen, CS [1 ]
Peng, DK [1 ]
机构
[1] UNIV SCI & TECHNOL CHINA,DEPT MAT SCI & ENGN,HEFEI 230026,PEOPLES R CHINA
关键词
alloy; composites; organometallic compounds; thin films; vapor deposition;
D O I
10.1016/S0025-5408(97)00005-6
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A novel metal-organic chemical vapor deposition(MOCVD) process with a mixed metal beta-diketone precursor to successfully prepare Pd and Pd-Ni alloy composite membranes is described. A palladium phase deposit consisting of agglomerates of tiny crystallites with a dimension of around 30 x 10 nm was formed on porous Al2O3 substrates, when using a single Pd(AcAc)(2) precursor. With a mixed precursor of Pd(AcAc)(2) + Ni(AcAc)(2), uniform and dense Pd-Ni alloy membranes (consisting of primary crystallites with a dimension of 40 x 15 nm) were reproducibly obtained on porous alumina supports. N-2 permeation tests indicated that the Pd-Ni alloy layer was gastight and crack-free. XPS studies revealed that no oxygen nor carbon impurities were incorporated into the bulk membranes. The Pd/Ni ratio on the surface of Pd-Ni alloy layer was very close to that of the mixed precursor, but much less Ni content (<1/150) was detected in the deposit body. Copyright (C) 1997 Elsevier Science Ltd.
引用
收藏
页码:385 / 395
页数:11
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