Electron emission characterization of diamond thin films grown from a solid carbon source

被引:22
作者
Jou, S [1 ]
Doerr, HJ [1 ]
Bunshah, RF [1 ]
机构
[1] UNIV CALIF LOS ANGELES, DEPT MAT SCI & ENGN, LOS ANGELES, CA 90095 USA
关键词
electrical properties and measurements; diamond; plasma processing and deposition; nanostructures;
D O I
10.1016/0040-6090(96)08756-1
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Diamond films of various morphologies and compositions have been deposited on silicon substrates by a plasma-enhanced chemical transport (PECT) process from a solid carbon source. Electron emission efficiency of these diamond films is related to their morphology and composition. The electric field required to excite emission in a boron-doped polycrystalline diamond film ranged between 20 to 50 MV m(-1) In an undoped conducting nanocrystalline diamond composite film, the field was as low as 5-11 MV m(-1). The cold field electron emission of these films is confirmed from the Fowler-Nordheim plots of the data. Enhancement of electron emission by band-bending and by the nanocrystalline microstructure are discussed. New diamond emitters made of nanocrystalline boron-doped diamond composite are proposed.
引用
收藏
页码:256 / 261
页数:6
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