Growth of LaCoO3 thin films from beta-diketonate precursors

被引：64

作者：

Seim, H

Nieminen, M

Niinisto, L

Fjellvag, H

Johansson, LS

机构：

[1] HELSINKI UNIV TECHNOL,INORGAN & ANALYT CHEM LAB,FIN-02150 ESPOO,FINLAND

[2] HELSINKI UNIV TECHNOL,CTR CHEM ANAL,FIN-02150 ESPOO,FINLAND

来源：

APPLIED SURFACE SCIENCE | 1997年 / 112卷

基金：

芬兰科学院;

关键词：

atomic layer epitaxy; thin films; lanthanum cobalt oxide; beta-diketonate; lanthanum oxide; cobalt oxide;

D O I：

10.1016/S0169-4332(96)01001-X

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

LaCoO3 thin films have been deposited in a flow-type atomic layer epitaxy (ALE) reactor from La(thd)(3) and Co(thd)(2), (thd = 2,2,6,6-tetramethyl-3,5-heptadione) precursors using ozone as oxygen source, Films were grown on both soda lime and Corning glass substrates in the temperature range of 200-400 degrees C. Profilometry, X-ray diffraction, Rutherford backscattering spectroscopy and X-ray photoelectron spectroscopy measurements were used to determine the thickness, crystallinity and stoichiometry of the films. The films grown below reactor temperatures of 400 degrees C were X-ray amorphous, but became crystalline LaCoO3 when annealed at 600 degrees C in air. Besides LaCoO3, the binary oxides (La2O3 and Co3O4) were also grown as thin films.

引用

页码：243 / 250

页数：8

共 23 条

[1] Burroughs P., 1976, J CHEM SOC DA, P1686
[2] Eyring L., 1979, HDB PHYSICS CHEM RAR, V3
[3] NONSTOICHIOMETRIC SURFACE BEHAVIOR OF LAMO3 OXIDES AS EVIDENCED BY XPS
FIERRO, JLG
TEJUCA, LG
[J]. APPLIED SURFACE SCIENCE, 1987, 27 (04) : 453 - 457
[4] THERMAL-ANALYSIS AS AN AID IN THE SYNTHESIS OF NONSTOICHIOMETRIC PEROVSKITE-TYPE OXIDES
FJELLVAG, H
HANSTEEN, OH
TILSET, BG
OLAFSEN, A
SAKAI, N
SEIM, H
[J]. THERMOCHIMICA ACTA, 1995, 256 (01) : 75 - 89
[5] DEPOSITION OF LAMO(3) (M=CO, CR, AL) FILMS BY SPRAY-PYROLYSIS IN INDUCTIVELY-COUPLED PLASMA
ICHINOSE, H
KATSUKI, H
NAGANO, M
[J]. JOURNAL OF CRYSTAL GROWTH, 1994, 144 (1-2) : 59 - 64
[6] DEPOSITION OF LAMO(3) (M=NI, CO, CR, AL)-ORIENTED FILMS BY SPRAY COMBUSTION-FLAME TECHNIQUE
ICHINOSE, H
SHIWA, Y
NAGANO, M
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (10): : 5907 - 5910
[7] LESKELA M, 1990, ATOMIC LAYER EPITAXY, P1
[8] XPS CHARACTERIZATION OF REDUCED LACOO3 PEROVSKITE
LOMBARDO, EA
TANAKA, K
TOYOSHIMA, I
[J]. JOURNAL OF CATALYSIS, 1983, 80 (02) : 340 - 349
[9] OXYGEN DETECTION BY NON-RUTHERFORD PROTON BACKSCATTERING BELOW 2.5 MEV
LUOMAJARVI, M
RAUHALA, E
HAUTALA, M
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 9 (03) : 255 - 258
[10] A NEW PREPARATION METHOD OF LACOO3 PEROVSKITE USING ELECTROCHEMICAL OXIDATION
MATSUMOTO, Y
SASAKI, T
HOMBO, J
[J]. INORGANIC CHEMISTRY, 1992, 31 (05) : 738 - 741

← 1 2 3 →