Modelization and characterization of asymmetrical thermal micro-actuators

被引：65

作者：

Lerch, P ^{[1
]}

Slimane, CK ^{[1
]}

Romanowicz, B ^{[1
]}

Renaud, P ^{[1
]}

机构：

[1] ECOLE POLYTECH FED LAUSANNE,PHB ECUBLENS,DEPT MECAN,CH-1015 LAUSANNE,SWITZERLAND

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 1996年 / 6卷 / 01期

关键词：

D O I：

10.1088/0960-1317/6/1/033

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Structures of very high aspect ratio which are mechanically stiff in the substrate direction and flexible in the direction parallel to the substrate are studied. Such structures can be exploited to produce thermal flexure actuators which are capable of large motion produced by thermal expansion. The magnitude of the deflection depends strongly on geometry and material properties. Structures fabricated by laser micro-machining are characterized and compared to numerical simulations.

引用

页码：134 / 137

页数：4