Microfabrication of an electroluminescent polymer light emitting diode pixel array

We describe a method to microfabricate a light emitting diode (LED) pixel array based on conjugated electroluminescent polymers sandwiched between ITO and aluminum. The method, based on direct photoablation using a 193 nm excimer laser, maintains intact the properties of the polymers. The technique as described here has already achieved array of 20 mu m x 20 mu m pixels with enhanced electroluminescence (EL) from pixels. The method can be extended to achieve nanometer sizes using nearfield nanolithography. The microfabrication of the LED array requires also the patterning of the ITO and the aluminum electrode. For better performance of the device it is important to map the conductivity of the patterned electrodes. For that purpose we have used a novel mm-wave conductivity microscope which is capable to measure the local conductivity of the patterned film with a spatial resolution of similar to 10-30 mu m.