共 12 条
[1]
BROADY PS, 1983, FERROELECTRICS, V50, P27
[2]
FUKUDA T, 1995, T JPN SOC MECH ENG, V61, P860
[3]
HAERTLING GH, 1971, J AM CERAM SOC, V54, P1, DOI [10.1111/j.1151-2916.1971.tb12296.x, 10.1111/j.1151-2916.1970.tb12105.x-i1]
[5]
ISHIHARA H, 1999, J ROB MECH, V11, P436
[6]
Kawaguchi K, 2002, FERROELECTRICS, V273, P2419, DOI 10.1080/00150190211789
[7]
Development of bi-directional valve-less micropump for liquid
[J].
MEMS '99: TWELFTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST,
1999,
:141-146
[8]
MORIKAWA Y, 2003, JPN SOC MECH ENG C, V69, P161
[9]
NAKADA T, 1992, J SOC MECH ENG C, V58, P189