Device physics -: In search of low-k dielectrics

[1] BALIGA J, 1998, SEMICOND INT JUN, P139

[2] DIELECTRICS IN MICROELECTRONICS - PROBLEMS AND PERSPECTIVES [J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1995, 187 : 1 - 9

[3] Porous inorganic materials [J]. CURRENT OPINION IN SOLID STATE & MATERIALS SCIENCE, 1996, 1 (06) : 798 - 805

[4] BRUINSMA PJ, 1996, P MAT RES SOC, V443, P105

[5] Structures and dielectric properties of thin polyimide films with nano-foam morphology [J]. APPLIED PHYSICS LETTERS, 1996, 68 (14) : 1930 - 1932

[6] Hedrick JL, 1999, ADV POLYM SCI, V141, P1

[7] HEDRICK JL, 1998, ADV MATER, V10, P1

[8] DIELECTRIC-PROPERTIES OF AEROGELS [J]. JOURNAL OF MATERIALS RESEARCH, 1993, 8 (07) : 1736 - 1741

[9] Porous silica xerogel processing and integration for ULSI applications [J]. LOW-DIELECTRIC CONSTANT MATERIALS IV, 1998, 511 : 213 - 222

[10] List RS, 1997, 1997 SYMPOSIUM ON VLSI TECHNOLOGY, P77, DOI 10.1109/VLSIT.1997.623703

[1] BALIGA J, 1998, SEMICOND INT JUN, P139

[2] DIELECTRICS IN MICROELECTRONICS - PROBLEMS AND PERSPECTIVES [J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1995, 187 : 1 - 9

[3] Porous inorganic materials [J]. CURRENT OPINION IN SOLID STATE & MATERIALS SCIENCE, 1996, 1 (06) : 798 - 805

[4] BRUINSMA PJ, 1996, P MAT RES SOC, V443, P105

[5] Structures and dielectric properties of thin polyimide films with nano-foam morphology [J]. APPLIED PHYSICS LETTERS, 1996, 68 (14) : 1930 - 1932

[6] Hedrick JL, 1999, ADV POLYM SCI, V141, P1

[7] HEDRICK JL, 1998, ADV MATER, V10, P1

[8] DIELECTRIC-PROPERTIES OF AEROGELS [J]. JOURNAL OF MATERIALS RESEARCH, 1993, 8 (07) : 1736 - 1741

[9] Porous silica xerogel processing and integration for ULSI applications [J]. LOW-DIELECTRIC CONSTANT MATERIALS IV, 1998, 511 : 213 - 222

[10] List RS, 1997, 1997 SYMPOSIUM ON VLSI TECHNOLOGY, P77, DOI 10.1109/VLSIT.1997.623703