Characterization of ozone sensors based on WO3 reactively sputtered films:: influence O2 concentration in the sputtering gas and working temperature

被引：100

作者：

Bendahan, M ^{[1
]}

Boulmani, R ^{[1
]}

Seguin, JL ^{[1
]}

Aguir, K ^{[1
]}

机构：

[1] Fac Sci & Tech St Jerome, UMR 6137 CNRS, L2MP, Lab Mat & Microelect,Serv 152, F-13397 Marseille 20, France

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2004年 / 100卷 / 03期

关键词：

WO3; gas sensors ozone; thin films; reactive sputtering;

D O I：

10.1016/j.snb.2004.01.023

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

We report on electrical responses of tungsten oxide thin film ozone sensors based on a tungsten trioxide (WO3)/tin oxide (SiO2)/Si structure with interdigitated Pt electrodes. The influence of O-2 concentration in the sputtering gas and working temperature of the sensor are investigated. Sensitivity to ozone increases with O-2 content in the sputtering gas. It reaches its highest value for sensors fabricated with 50% O-2. For these sensors, the best ozone sensitivity and shortest response and recovery times are obtained at a working temperature of 523 K. Ozone sensitivity is compared to other ozone sensors. (C) 2004 Elsevier B.V. All rights reserved.

引用

页码：320 / 324

页数：5

共 21 条

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