Shape control of near-field probes using dynamic meniscus etching

被引：24

作者：

Haber, LH ^{[1
]}

Schaller, RD ^{[1
]}

Johnson, JC ^{[1
]}

Saykally, RJ ^{[1
]}

机构：

[1] Univ Calif Berkeley, Dept Chem, Berkeley, CA 94720 USA

来源：

JOURNAL OF MICROSCOPY | 2004年 / 214卷

关键词：

compound parabolic concentrator; etching techniques; meniscus formation; near-field optics; NSOM; optical fibre probes; scanning microscopy; throughput efficiency; tip cone angle; tip shape;

D O I：

10.1111/j.0022-2720.2004.01308.x

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

Dynamic etching methods for fabricating fibre optic tips are explored and modelled. By vertically translating the fibre during etching by an HF solution under an organic protective layer, a variety of tip shapes were created. The probe taper lengths, cone angles and geometrical probe shapes were measured in order to evaluate the dynamic meniscus etching process. Fibre motion, etching rate, meniscus distortion and etching time were all found to be important variables that can be used to control the final probe shape.

引用

页码：27 / 35

页数：9

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