The fabrication of nonplanar spin-on glass microstructures

被引:18
作者
Liu, RH [1 ]
Vasile, MJ
Beebe, DJ
机构
[1] Univ Illinois, Beckman Inst Adv Sci & Technol, Dept Elect & Comp Engn, Urbana, IL 61801 USA
[2] Univ Illinois, Beckman Inst Adv Sci & Technol, Dept Mech & Ind Engn, Urbana, IL 61801 USA
[3] Louisiana Tech Univ, Inst Micromfg, Ruston, LA 71272 USA
关键词
glass microstructures; LIGA; spin-on glass;
D O I
10.1109/84.767110
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper presents a new application of spin-on glass to fabricate nonplanar dielectric structures (channel plate microstructures) with aspect ratios (i.e., ratio of channel length to channel width) of 20:1. A variety of microchannel geometries have been fabricated. The LIGA process is used to make nickel molds up to 150 mu m in height with mechanically planarized surfaces. Spin-on glass (SOG) is applied to obtain glass structures in nickel molds. A multiple dispensing/drying/curing process was developed resulting in crack-free SOG structures. Reverse electroplating is used to remove the nickel mold and release the glass structures.' The resulting freestanding glass microchannel plates (>100 mu m in height) demonstrated good electrical properties (400-V/mu m breakdown voltage) and good spatial definition.
引用
收藏
页码:146 / 151
页数:6
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