共 21 条
[2]
BAGLEY BG, 1987, MAT RES S S P PITTSB, V88, P35
[3]
BAGLEY BG, 1984, BETTER CERAMICS CHEM, P287
[4]
Becker E. W., 1986, Microelectronic Engineering, V4, P35, DOI 10.1016/0167-9317(86)90004-3
[5]
BLEY P, 1991, P MICR SYST TECHN 91, P302
[7]
CROSBY WJ, 1995, COMMUNICATION
[8]
DIETRICH TR, 1996, MICROELECTRONIC ENG, V30, P775
[9]
Harrison D.J., 1993, Proceedings of Transducers, V93, P403
[10]
JOHNSON CB, 1992, SPIE, V1952, P340