Thin-film silicon MEMS DNA sensors

被引：12

作者：

Adrega, T.

Prazeres, D. M. F.

Chu, V.

Conde, J. P.

机构：

[1] INESC, P-100029 Lisbon, Portugal

[2] Ctr Biol & Chem Engn, Inst Super Tecn, Lisbon, Portugal

[3] Univ Tecn Lisboa, Dept Chem Engn, Inst Super Tecn, Lisbon, Portugal

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 2006年 / 352卷 / 9-20期

关键词：

silicon; biosensors; MEMS; sensors;

D O I：

10.1016/j.jnoncrysol.2006.01.079

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Thin-film microelectromechanical molecular sensors are fabricated at temperatures below 110 degrees C on glass substrates. The microelectromechanical structure consists of a surface micromachined bilayer bridge of phosphorous-doped hydrogenated amorphous silicon and aluminum. There is specific binding of DNA to hydroxylated bridge surfaces through silanization chemistry. Microbridges are electrostatically actuated and the resonance frequency measurements are performed in vacuum in the initial state after fabrication, after surface functionalization and after DNA immobilization. The sensor is able to detect the functionalization molecular layer and the DNA molecules attached to the surface through a shift in its resonance frequency. (c) 2006 Elsevier B.V. All rights reserved.

引用

收藏

页码：1999 / 2003

页数：5

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