Detection of infrared photons using the electronic stress in metal-semiconductor interfaces

被引:5
作者
Datskos, PG [1 ]
Rajic, S [1 ]
Egert, CM [1 ]
Datskou, I [1 ]
机构
[1] Oak Ridge Natl Lab, Oak Ridge, TN 37831 USA
来源
INFRARED TECHNOLOGY AND APPLICATIONS XXV | 1999年 / 3698卷
关键词
MEMS; micromechanical; photon detector; thermal detector; microcantilever; photo-induced stress; photo-emission;
D O I
10.1117/12.354516
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
It is well known that the work function of metals decreases when they are placed in a nonpolar liquid A similar decrease occurs when the metal is placed into contact with a semiconductor forming a Schottky barrier. We report on a new method for detecting photons using the stress caused by photo-electrons emitted from a metal film surface in contact with a semiconductor microstructure. The photoelectrons diffuse into the microstructure and produce an electronic stress. The photon detection results from the measurement of the photo-induced bending of the microstructure. Internal photo-emission has been used in the past to detect photons, however, in those cases the detection was accomplished by measuring the current due to photoelectrons and not due to electronic stress. Small changes in position (displacement) of microstructures are routinely measured in atomic force microscopy (AFM) where atomic imaging of surfaces relies on the measurement of small changes (< 10(-9) m) in the bending of microcantilevers. m the present work we studied the photon response of Si microcantilevers with a thin film of Pt. The Si microcantilevers were 500 nm thick and had a 30 nm layer of Pt. Photons with high enough energies produce electrons from the platinum-silicon interface which diffuse into the Si and produce an electronic stress. Since the excess charge carriers cause the Si microcantilever to contract in length but not the Pt layer, the bimaterial microcantilever bends. In our present studies we used the optical detection technique to measure the photometric response of Pt-Si microcantilevers as a function of photon energy. The charge carriers responsible for the photo-induced stress in Si, were produced via internal photo-emission using a diode laser with wavelength lambda =1550 nm.
引用
收藏
页码:151 / 160
页数:10
相关论文
共 29 条
[1]  
AMANTEA R, 1997, SPIE ORL FL
[2]   Remote infrared radiation detection using piezoresistive microcantilevers [J].
Datskos, PG ;
Oden, PI ;
Thundat, T ;
Wachter, EA ;
Warmack, RJ ;
Hunter, SR .
APPLIED PHYSICS LETTERS, 1996, 69 (20) :2986-2988
[3]   Photoinduced and thermal stress in silicon microcantilevers [J].
Datskos, PG ;
Rajic, S ;
Datskou, I .
APPLIED PHYSICS LETTERS, 1998, 73 (16) :2319-2321
[4]  
Dereniak E., 1996, INFRARED DETECTORS S
[5]  
FEYNMAN R, 1964, FEYNMAN LECT PHYSICS, V2
[6]   PHOTOSTRICTION EFFECT IN GERMANIUM [J].
FIGIELSKI, T .
PHYSICA STATUS SOLIDI, 1961, 1 (04) :306-316
[7]  
HANSON C, 1993, P SOC PHOTO-OPT INS, V2020, P330, DOI 10.1117/12.160554
[8]   Fabrication and characterization of 100-nm-thick GaAs cantilevers [J].
Harris, JGE ;
Awschalom, DD ;
Maranowski, KD ;
Gossard, AC .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1996, 67 (10) :3591-3593
[9]  
Hess P., 1989, Photoacoustic, Photothermal and Photochemical Processes at Surfaces and in Thin Films
[10]   QUANTIZED ADHESION DETECTED WITH THE ATOMIC FORCE MICROSCOPE [J].
HOH, JH ;
CLEVELAND, JP ;
PRATER, CB ;
REVEL, JP ;
HANSMA, PK .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1992, 114 (12) :4917-4918