Fabrication of microcomponents using ultraprecision machine tools

被引：50

作者：

Weck, M

Fischer, S

Vos, M

机构：

[1] Fraunhofer-Inst. of Prod. Technology, Dept. of Production Machine Tools, D-52974 Aachen

来源：

NANOTECHNOLOGY | 1997年 / 8卷 / 03期

关键词：

D O I：

10.1088/0957-4484/8/3/007

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The fabrication of microcomponents or microstructured surfaces with conventional manufacturing methods--such as turning, milling or drilling-imposes high demands on the machine behavior. The high requirements in terms of machine characteristics are currently met by only few ultraprecision machine tools. A broad range of materials such as, for example, non-ferrous metals or plastics can be machined, producing real three-dimensional structures with an optical surface quality.

引用

页码：145 / 148

页数：4