Multi-layered thick-film gas sensor array for selective sensing by catalytic filtering technology

被引:37
作者
Kwon, CH
Yun, DH
Hong, HK
Kim, SR
Lee, K
Lim, HY
Yoon, KH
机构
[1] LG Corp Inst Technol, Devices & Mat Lab, SR Team, Seoul 137140, South Korea
[2] Yonsei Univ, Dept Ceram Engn, Seoul 120140, South Korea
关键词
oxide semiconductor; sensor array; catalytic filtering; selectivity;
D O I
10.1016/S0925-4005(99)00426-8
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
A C3H8 gas sensor array with high sensitivity and good selectivity by the combination of the catalytic filtering and the gas diffusion control has been achieved. The gas sensor array consists of a couple of catalytic filter layers, one with a Pd and the other with a Pt, a SiO2 insulating layer and two sensing layers on an alumina substrate. The sensor array shows high sensitivity to 500 ppm of C3H8 at temperature above 400 degrees C and good selectivity for the interfering gases such as CO and C2H5OH by using a simple signal processing technique. (C) 2000 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:327 / 330
页数:4
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