FTIR spectroscopy and FTIR microscopy of vacuum-evaporated polyimide thin films

被引:64
作者
Karamancheva, I
Stefov, V
Soptrajanov, B
Danev, G
Spasova, E
Assa, J
机构
[1] Univ Chem Technol & Met, BU-1756 Sofia, Bulgaria
[2] Univ Sv Kiril & Metodij, PMF, Inst Hemija, Skopje 91001, Macedonia
[3] Makedonska Akad Naukite & Umetnostite, Skopje, Macedonia
[4] Bulgarian Acad Sci, Cent Lab Photoproc, BU-1113 Sofia, Bulgaria
基金
新加坡国家研究基金会;
关键词
FTIR spectroscopy; deconvolution; FTIR microscopy; polyimide films;
D O I
10.1016/S0924-2031(99)00011-9
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
Polyimide (PI) thin films can be formed by vapor co-deposition of the precursor molecules pyromellitic dianhydride (PMDA) and 4,4'-oxydianiline (ODA) if the resulting polyamic acid film is heated above 150 degrees C, The effects of dose stoichiometry and curing temperature on the imidization rate and crystallization of PI films were investigated using Fourier transform infrared (FTIR) spectroscopy and microscopy. The apparent spectral resolution was enhanced using the Fourier self-deconvolution (FSD) method and the profiles were then fully deconvoluted by a curve fitting procedure. The FSD method followed by curve fitting was used to evaluate quantitatively the areas under the isoimide peaks. The microscopic study showed no evidence for PMDA phase separation and crystallization. PI films deposited under optimum conditions showed a maximum imidization and crystal structure superior to that of films fabricated by other techniques, (C) 1999 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:369 / 374
页数:6
相关论文
共 12 条
[1]  
ASSA J, IN PRESS VACUUM, V50
[2]  
BESSONOV MI, 1992, POLYIMIDES THERMALLY
[3]  
GAN S, 1992, SCI ENG COMPOS MATER, V2, P119
[4]   SPECTROSCOPIC STUDIES OF POLY[N,N'-BIS(PHENOXYPHENYL)PYROMELLITIMIDE] .1. STRUCTURES OF THE POLYIMIDE AND 3 MODEL COMPOUNDS [J].
ISHIDA, H ;
WELLINGHOFF, ST ;
BAER, E ;
KOENIG, JL .
MACROMOLECULES, 1980, 13 (04) :826-834
[5]   SYNTHESIS OF CRYSTALLINE POLYIMIDE FILM BY IONIZED CLUSTER-BEAM DEPOSITION [J].
KIM, KW ;
CHOI, SC ;
KIM, SS ;
CHO, SJ ;
WHANG, CN ;
CHOE, HS ;
JUNG, HJ ;
LEE, DH ;
LEE, JK .
JOURNAL OF MATERIALS SCIENCE, 1993, 28 (06) :1537-1541
[6]  
KUDRYAVTSEV VV, 1975, VYSOKOMOL SOEDIN A+, V17, P1764
[7]  
MITTAL KL, 1983, POLYIMIDES SYNTHESIS, V2
[8]   EFFECT OF DOSE STOICHIOMETRY ON THE STRUCTURE OF VAPOR-DEPOSITED POLYIMIDE THIN-FILMS [J].
PETHE, RG ;
CARLIN, CM ;
PATTERSON, HH ;
UNERTL, WN .
JOURNAL OF MATERIALS RESEARCH, 1993, 8 (12) :3218-3228
[9]  
SALEM IR, 1989, J VAC SCI TECHNOL, V4, P369
[10]  
Soane DS, 1989, POLYM MICROELECTRONI