High Sensitivity Fiber Bragg Grating Pressure Sensor Using Thin Metal Diaphragm

被引：39

作者：

Ahmad, Harith ^{[1
]}

Chong, Wu Yi ^{[1
]}

Thambiratnam, Kavintheran ^{[1
]}

Zulklifi, Mohd Zamani ^{[1
]}

Poopalan, Prabakaran ^{[2
]}

Thant, Muang Muang Myo ^{[3
]}

Harun, Sulaiman Wadi ^{[1
]}

机构：

[1] Univ Malaya, Photon Res Ctr, Kuala Lumpur 50603, Malaysia

[2] Univ Malaysia Perlis, Sch Microelect Engn, Arau 02600, Perlis, Malaysia

[3] Kawasan Inst Bangi, Petronas Res Serv Sdn Bhd, Kajang 43000, Selangor, Malaysia

来源：

IEEE SENSORS JOURNAL | 2009年 / 9卷 / 12期

关键词：

Fiber Bragg grating (FBG); optical pressure sensor; pressure sensor;

D O I：

10.1109/JSEN.2009.2030388

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A high sensitivity pressure sensor design without a polymer transducer is demonstrated in this paper. The sensor uses a thin metal diaphragm as a pressure transducer instead of a polymer. The sensor is tested to a maximum pressure of 100 psi and has a sensitivity of 0.0115 nm/psi, which matches the calculated sensitivity of 0.0127 nm/psi. The sensor is provides accurate measurement of the pressure and shows good repeatability in its readings. The sensor is also tested at the flow loop of the University of Tulsa, and shows a good match with the pressure readings of the flow loop.

引用

页码：1654 / 1659

页数：6

共 10 条

[1] High-sensitivity pressure sensor using a polymer-embedded FBG [J].