Asphere testing with a Fizeau interferometer based on a combined computer-generated hologram

被引：45

作者：

Asfour, JM

Poleshchuk, AG

机构：

[1] Diopt GMBH, D-69469 Weinheim, Germany

[2] Russian Acad Sci, Inst Automat & Electrometry, Novosibirsk 630090, Russia

来源：

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION | 2006年 / 23卷 / 01期

关键词：

D O I：

10.1364/JOSAA.23.000172

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Fizeau interferometers with an additional diffractive optical element are frequently used for measuring spherical and aspherical surfaces. We present a new (to our knowledge) optical test method, in which the Fizeau principle is now perfectly fulfilled by generating reference and measuring wavefront on the last optical surface, which carries a diffractive optical element. This method has been examined experimentally by testing a reference f/0.68 spherical mirror and can be applied identically for testing aspheres. Several advantages of this method are discussed and proved experimentally. (c) 2006 Optical Society of America.

引用

页码：172 / 178

页数：7

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